Helium Implantation Damage in SiC

Solid State Phenomena 2005 Vol. 108-109

Helium Implantation Damage in SiC

Leclerc, Stephanie, Beaufort, Marie France, Audurier, Valerie, Déclemy, Alain, Barbot, Jean François
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Volume:
108-109
Year:
2005
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.108-109.709
File:
PDF, 282 KB
english, 2005
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