Retardation Phenomenon of Oxide Removal during the...

Retardation Phenomenon of Oxide Removal during the Formation of Dual Gate Oxide via PR-Mask Wet Etching

Ko, Ki Hyung, Song, Myung Geun, Cho, Byung Kwon, Yoon, Bo Un, Cho, Yu Jin, Kim, Tae Sung
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Volume:
219
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.219.24
Date:
September, 2014
File:
PDF, 763 KB
english, 2014
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