Stress - Dependent Out - Annealing of Defects in Self -...

Stress - Dependent Out - Annealing of Defects in Self - Implanted Silicon

Misiuk, Andrzej, Surma, Barbara, Bak-Misiuk, Jadwiga
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Volume:
108-109
Year:
2005
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.108-109.351
File:
PDF, 731 KB
english, 2005
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