Comparison between Chemical and Electrical Profiles in Al+...

Materials Science Forum 2002 Vol. 389-393

Comparison between Chemical and Electrical Profiles in Al+ or N+ Implanted and Annealed 6H-SiC

Nipoti, Roberta, Carnera, A., Raineri, Vito
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Volume:
389-393
Year:
2002
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.389-393.811
File:
PDF, 328 KB
2002
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