Catalyst Assisted Low Temperature Pre Epitaxial Cleaning...

Solid State Phenomena 2014 / 9 Vol. 219

Catalyst Assisted Low Temperature Pre Epitaxial Cleaning for Si and SiGe Surfaces

Dhayalan, Sathish Kumar, Hikavyy, Andriy, Loo, Roger, Wostyn, Kurt, Kenis, Karine, Shimura, Yosuke, Rosseel, Erik, Profijt, Harald B., Maes, Jan Willem, Douhard, Bastien, Vandervorst, Wilfried
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
219
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.219.16
Date:
September, 2014
File:
PDF, 778 KB
english, 2014
Conversion to is in progress
Conversion to is failed