Study of Near-Surface Microdefects in Czochralski-Si Wafers After a CMOS Thermal Process
Kitagawara, Y., Aihara, K., Oka, S., Takenaka, TakaoVolume:
196-201
Year:
1995
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.196-201.1835
File:
PDF, 424 KB
1995