Study of Near-Surface Microdefects in Czochralski-Si Wafers...

Study of Near-Surface Microdefects in Czochralski-Si Wafers After a CMOS Thermal Process

Kitagawara, Y., Aihara, K., Oka, S., Takenaka, Takao
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Volume:
196-201
Year:
1995
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.196-201.1835
File:
PDF, 424 KB
1995
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