Comparative Studies of Ultra Low-κ Porous Silica Films with...

MRS Proceedings 2004 / 1 Vol. 812

Comparative Studies of Ultra Low-κ Porous Silica Films with 2-D Hexagonal and Disordered Pore Structures

Fujii, Nobutoshi, Yamada, Kazuhiro, Oku, Yoshiaki, Hata, Nobuhiro, Seino, Yutaka, Negoro, Chie, Kikkawa, Takamaro
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Volume:
812
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-812-F4.10
Date:
January, 2004
File:
PDF, 685 KB
english, 2004
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