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The Role of Mass Transfer in Removal of Cross-Linked Sacrificial Layers in 3DI Applications
Sobhian, Mani, Goodman, Daniel L., Rabideau, Dustin, Keigler, ArthurVolume:
219
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.219.233
Date:
September, 2014
File:
PDF, 648 KB
english, 2014