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EBIC Characterization of Oxygen Precipitation and Denuded Zone in Intrinsically Gettered P-Type Czochralski Silicon
Spiga, S., Castaldini, Antonio, Cavallini, Anna, Polignano, Maria Luisa, Cazzaniga, F.Volume:
63-64
Year:
1998
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.63-64.97
File:
PDF, 633 KB
english, 1998