Effect of Chemical Solution on the Stability of Low-k Films
Kesters, E., Le, Quoc Toan, Baklanov, Mikhail R., Boullart, Werner, Mertens, Paul W.Volume:
103-104
Year:
2005
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.103-104.349
File:
PDF, 290 KB
english, 2005