Substitutional Gettering of Platinum by Diffusion into...

Substitutional Gettering of Platinum by Diffusion into Ion-Beam Damaged Silicon

Nielsen, K. Bonde, Holm, B.
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Volume:
196-201
Year:
1995
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.196-201.1985
File:
PDF, 426 KB
1995
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