DLTS Study on Deep Levels Formed in Plasma Hydrogenated and...

Solid State Phenomena 2005 Vol. 108-109

DLTS Study on Deep Levels Formed in Plasma Hydrogenated and Subsequently Annealed Silicon

Huang, Yue Long, Simoen, Eddy, Claeys, C., Job, Reinhart, Ma, Yue, Düngen, Wolfgang, Fahrner, Wolfgang R., Versluys, J., Clauws, Paul
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Volume:
108-109
Year:
2005
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.108-109.547
File:
PDF, 405 KB
english, 2005
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