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Co-Solvent Effect on the HF/CO2 Dry Etching of Sacrificial Oxides
Bae, Jae Hyun, Jung, Jae Mok, Lim, Kwon TaekVolume:
145-146
Year:
2009
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.145-146.235
File:
PDF, 359 KB
english, 2009