Heteroepitaxial Growth and Characteristics of 3C-SiC on...

Materials Science Forum 2002 Vol. 389-393

Heteroepitaxial Growth and Characteristics of 3C-SiC on Large-Diameter Si(001) Substrates

Nagasawa, Hiroyuki, Kawahara, Takamitsu, Yagi, Kuniaki
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Volume:
389-393
Year:
2002
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.389-393.319
File:
PDF, 417 KB
2002
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