Colour coding Ge concentrations in Si...

Semiconductor Science and Technology 2004 / 03 Vol. 19; Iss. 3

Colour coding Ge concentrations in Si 1  x Ge x by bevelling and oxidation: CABOOM

Fobelets, K, Tan, T L, Thielemans, K, Ahmad, M M, Ferguson, R S, Zhang, J
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Volume:
19
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/19/3/040
Date:
March, 2004
File:
PDF, 260 KB
english, 2004
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