Contactless electroreflectance of ZnO layers grown by atomic layer deposition at low temperature
Kudrawiec, R, Misiewicz, J, Wachnicki, Ł, Guziewicz, E, Godlewski, MVolume:
26
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/26/7/075012
Date:
July, 2011
File:
PDF, 928 KB
english, 2011