Characterization of the tuning performance of a micro-machined Fabry–Pérot interferometer for thermal infrared
Tuohiniemi, M, Näsilä, A, Mäkynen, JVolume:
23
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/23/7/075011
Date:
July, 2013
File:
PDF, 856 KB
english, 2013