Nitrogen effect on grown-in defects in Czochralski silicon crystals
Shigeru Umeno, Toshiaki Ono, Tadami Tanaka, Eiichi Asayama, Hideshi Nishikawa, Masataka Hourai, Hisashi Katahama, Masakazu SanoVolume:
236
Year:
2002
Language:
english
Pages:
5
DOI:
10.1016/s0022-0248(01)02137-6
File:
PDF, 106 KB
english, 2002