Analysis of silicon carbide growth by sublimation sandwich...

Analysis of silicon carbide growth by sublimation sandwich method

S.Yu. Karpov, Yu.N. Makarov, E.N. Mokhov, M.G. Ramm, M.S. Ramm, A.D. Roenkov, R.A. Talalaev, Yu.A. Vodakov
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Volume:
173
Year:
1997
Language:
english
Pages:
9
DOI:
10.1016/s0022-0248(96)00969-4
File:
PDF, 715 KB
english, 1997
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