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High-quality silicon/insulator heteroepitaxial structures formed by molecular beam epitaxy using Al2O3 and Si
Young-Chul Jung, Hiroyuki Miura, Kentaro Ohtani, Makoto IshidaVolume:
196
Year:
1999
Language:
english
Pages:
9
DOI:
10.1016/s0022-0248(98)00725-8
File:
PDF, 455 KB
english, 1999