Instability of diborane gas in silicon epitaxial film growth
Hitoshi Habuka, Shoji Akiyama, Toru Otsuka, Wei-Feng QuVolume:
209
Year:
2000
Language:
english
Pages:
9
DOI:
10.1016/s0022-0248(99)00732-0
File:
PDF, 184 KB
english, 2000