Low-Temperature Radiation Enhanced Diffusion of Implanted...

Solid State Phenomena 2005 Vol. 108-109

Low-Temperature Radiation Enhanced Diffusion of Implanted Platinum in Silicon with Increased Controllability

Hazdra, Pavel, Vobecký, Jan
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Volume:
108-109
Year:
2005
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/ssp.108-109.419
File:
PDF, 338 KB
english, 2005
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