The Effect of PVA Brush Scrubbing on Post CMP Cleaning...

The Effect of PVA Brush Scrubbing on Post CMP Cleaning Process for Damascene Cu Interconnection

Cho, Han Chul, Kim, Young Min, Lee, Hyun Seop, Joo, Suk Bae, Jeong, Hae Do
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Volume:
145-146
Year:
2009
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/ssp.145-146.367
File:
PDF, 410 KB
english, 2009
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