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The Effect of PVA Brush Scrubbing on Post CMP Cleaning Process for Damascene Cu Interconnection
Cho, Han Chul, Kim, Young Min, Lee, Hyun Seop, Joo, Suk Bae, Jeong, Hae DoVolume:
145-146
Year:
2009
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/ssp.145-146.367
File:
PDF, 410 KB
english, 2009