Simplified Cleaning for a-Si:H Passivation of Wafers Bonded to Glass
Granata, Stefano Nicola, Bearda, T., Gordon, I., Abdulraheem, Y., Mertens, R., Poortmans, J.Volume:
219
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/ssp.219.297
Date:
September, 2014
File:
PDF, 275 KB
english, 2014