Copper Precipitation in Monocrystalline Silicon: Role of Initial Oxygen Concentration and Thermal Oxidation
Correia, A., Boutry-Forveille, A., Ballutaud, D.Volume:
47-48
Year:
1996
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/ssp.47-48.353
File:
PDF, 684 KB
1996