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Raman Spectroscopic Analysis of Hydrogen Plasma Treated Czochralski Silicon
Job, Reinhart, Ulyashin, Alexander G., Fahrner, Wolfgang R.Volume:
82-84
Year:
2002
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/ssp.82-84.139
File:
PDF, 480 KB
2002