Novel hydrofluorocarbon polymers for use as pellicles in...

Journal of Fluorine Chemistry 2003 Vol. 122; Iss. 1

Novel hydrofluorocarbon polymers for use as pellicles in 157 nm semiconductor photolithography: fundamentals of transparency

Roger H French, Robert C Wheland, Weiming Qiu, M.F Lemon, Edward Zhang, Joseph Gordon, Viacheslav A Petrov, Victor F Cherstkov, Nina I Delaygina
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Volume:
122
Year:
2003
Language:
english
Pages:
18
DOI:
10.1016/s0022-1139(03)00081-2
File:
PDF, 408 KB
english, 2003
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