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A new empirical extrapolation method for time-dependent dielectric breakdown reliability projections of thin SiO2 and nitride–oxide dielectrics
Fen Chen, Rolf-Peter Vollertsen, Baozhen Li, Dave Harmon, Wing L. LaiVolume:
42
Year:
2002
Language:
english
Pages:
7
DOI:
10.1016/s0026-2714(01)00261-x
File:
PDF, 150 KB
english, 2002