Calculation of thermoelastic stresses in microelectronics
Lieven Matthys, Erwin De Baetselier, Wouter Dobbelaere, Wim Goedertier, Gilbert De MeyVolume:
38
Year:
1998
Language:
english
Pages:
6
DOI:
10.1016/s0026-2714(97)00033-4
File:
PDF, 336 KB
english, 1998