Thermodynamic study, compositional and electrical...

Microelectronics Reliability 1998 Vol. 38; Iss. 2

Thermodynamic study, compositional and electrical characterization of LPCVD SiO2 films grown from TEOS/N2O mixtures

V.Em. Vamvakas, D. Davazoglou, C. Vahlas
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Volume:
38
Year:
1998
Language:
english
Pages:
5
DOI:
10.1016/s0026-2714(97)00036-x
File:
PDF, 198 KB
english, 1998
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