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A new experimental technique to evaluate the plasma induced damage at wafer level testing
L. Pantisano, A. Paccagnella, L. Pettarin, A. Scarpa, G. Valentini, L. Baldi, S. AlbaVolume:
38
Year:
1998
Language:
english
Pages:
6
DOI:
10.1016/s0026-2714(98)00102-4
File:
PDF, 410 KB
english, 1998