Cantilever influence suppression of contactless IC-testing...

Microelectronics Reliability 1998 Vol. 38; Iss. 6-8

Cantilever influence suppression of contactless IC-testing by electric force microscopy

V. Wittpahl, U. Behnke, B. Wand, W. Mertin
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Volume:
38
Year:
1998
Language:
english
Pages:
6
DOI:
10.1016/s0026-2714(98)00118-8
File:
PDF, 427 KB
english, 1998
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