Detailed investigation of SEM-results by TEM at one sample...

Microelectronics Reliability 1998 Vol. 38; Iss. 6-8

Detailed investigation of SEM-results by TEM at one sample using FIB-technique

U. Mühle, A. Wiesner, S. Schray
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
38
Year:
1998
Language:
english
Pages:
5
DOI:
10.1016/s0026-2714(98)00147-4
File:
PDF, 476 KB
english, 1998
Conversion to is in progress
Conversion to is failed