Slow-trap profiling of NO and N2O nitrided oxides grown on Si and SiC substrates
Sima Dimitrijev, Philip Tanner, H.Barry HarrisonVolume:
39
Year:
1999
Language:
english
Pages:
9
DOI:
10.1016/s0026-2714(99)00022-0
File:
PDF, 268 KB
english, 1999