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The different roles of charged and neutral atomic and molecular oxidising species in silicon oxidation from ab initio calculations
M.A Szymanski, A.M Stoneham, A ShlugerVolume:
45
Year:
2001
Language:
english
Pages:
8
DOI:
10.1016/s0038-1101(00)00263-x
File:
PDF, 455 KB
english, 2001