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High quality thin oxynitride by RTP annealing of in situ steam generation oxides for flash memory applications
D Brazzelli, G Ghidini, B Crivelli, R Zonca, M BersaniVolume:
45
Year:
2001
Language:
english
Pages:
8
DOI:
10.1016/s0038-1101(01)00057-0
File:
PDF, 700 KB
english, 2001