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Ultra-thin gate oxide reliability projections
B.E. Weir, M.A. Alam, P.J. Silverman, F. Baumann, D. Monroe, J.D. Bude, G.L. Timp, A. Hamad, Y. Ma, M.M. Brown, D. Hwang, T.W. Sorsch, A. Ghetti, G.D. WilkVolume:
46
Year:
2002
Language:
english
Pages:
8
DOI:
10.1016/s0038-1101(01)00103-4
File:
PDF, 205 KB
english, 2002