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Reliability of ultra-thin film deep submicron SIMOX nMOSFETs
O. Potavin, S. Haendler, J. Jomaah, F. Balestra, C. RaynaudVolume:
46
Year:
2002
Language:
english
Pages:
5
DOI:
10.1016/s0038-1101(01)00110-1
File:
PDF, 318 KB
english, 2002