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Analytical and numerical study of the impact of HALOs on short channel and hot carrier effects in scaled MOSFETs
S. Zanchetta, A. Todon, A. Abramo, L. Selmi, E. SangiorgiVolume:
46
Year:
2002
Language:
english
Pages:
6
DOI:
10.1016/s0038-1101(01)00116-2
File:
PDF, 227 KB
english, 2002