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Tantalum pentoxide obtained from TaNx and TaSi2 anodisation: an inexpensive and thermally stable high k dielectric
S. Dueñas, E. Castán, J. Barbolla, R.R. Kola, P.A. SullivanVolume:
45
Year:
2001
Language:
english
Pages:
10
DOI:
10.1016/s0038-1101(01)00125-3
File:
PDF, 289 KB
english, 2001