High breakdown M–I–M structures on bulk AlN

High breakdown M–I–M structures on bulk AlN

B Luo, J.W Johnson, O Kryliouk, F Ren, S.J Pearton, S.N.G Chu, A.E Nikolaev, Yu.V Melnik, V.A Dmitriev, T.J Anderson
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Volume:
46
Year:
2002
Language:
english
Pages:
4
DOI:
10.1016/s0038-1101(01)00299-4
File:
PDF, 299 KB
english, 2002
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