Release of multi-layer metal structure in MEMS devices by...

Release of multi-layer metal structure in MEMS devices by dry etching technique

N.C Das
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Volume:
46
Year:
2002
Language:
english
Pages:
4
DOI:
10.1016/s0038-1101(01)00301-x
File:
PDF, 99 KB
english, 2002
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