Electrical characterization of low thermal budget gate...

Solid-State Electronics 2002 Vol. 46; Iss. 7

Electrical characterization of low thermal budget gate oxides on Si/Si0.8Ge0.2/Si substrates

Alok Sareen, Ann-Chatrin Lindgren, Per Lundgren, Stefan Bengtsson
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Volume:
46
Year:
2002
Language:
english
Pages:
5
DOI:
10.1016/s0038-1101(02)00032-1
File:
PDF, 168 KB
english, 2002
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