Ag metallization with high electromigration resistance for...

Solid-State Electronics 2003 Vol. 47; Iss. 7

Ag metallization with high electromigration resistance for ULSI

M Hauder, W Hansch, J Gstöttner, D Schmitt-Landsiedel
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Volume:
47
Year:
2003
Language:
english
Pages:
5
DOI:
10.1016/s0038-1101(03)00036-4
File:
PDF, 245 KB
english, 2003
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