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Fabrication of Schottky barrier MOSFETs on SOI by a self-assembly CoSi2-patterning method
Qing-Tai Zhao, Patrick Kluth, Stephan Winnerl, Siegfried MantlVolume:
47
Year:
2003
Language:
english
Pages:
4
DOI:
10.1016/s0038-1101(03)00046-7
File:
PDF, 154 KB
english, 2003