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CO-implantation of Si and Be in SI GaAs for improved device performance
M.B. Dutt, Ram Nath, Rajendra Kumar, M.N. Sen, Vikram KumarVolume:
42
Year:
1998
Language:
english
Pages:
6
DOI:
10.1016/s0038-1101(98)00121-x
File:
PDF, 286 KB
english, 1998