Sputtered tungsten films on polyimide, an application for X-ray masks
J Ligot, S Benayoun, J.J Hantzpergue, J.C RemyVolume:
43
Year:
1999
Language:
english
Pages:
4
DOI:
10.1016/s0038-1101(99)00027-1
File:
PDF, 124 KB
english, 1999