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Volume 43; Issue 6
Main
Solid-State Electronics
Volume 43; Issue 6
Solid-State Electronics
Volume 43; Issue 6
1
Editorial
Journal:
Solid-State Electronics
Year:
1999
Language:
english
File:
PDF, 62 KB
Your tags:
english, 1999
2
Interconnect technology trend for microelectronics
Ruichen Liu
,
Chien-Shing Pai
,
Emilio Martinez
Journal:
Solid-State Electronics
Year:
1999
Language:
english
File:
PDF, 132 KB
Your tags:
english, 1999
3
Factors which determine the orientation of CVD Al films grown on TiN
M. Avinun
,
W.D. Kaplan
,
M. Eizenberg
,
T. Guo
,
R. Mosely
Journal:
Solid-State Electronics
Year:
1999
Language:
english
File:
PDF, 125 KB
Your tags:
english, 1999
4
Study of Cu contamination during copper integration for subquarter micron technology
P Motte
,
J Torres
,
J Palleau
,
F Tardif
,
H Bernard
Journal:
Solid-State Electronics
Year:
1999
Language:
english
File:
PDF, 154 KB
Your tags:
english, 1999
5
The interaction of metals and barrier layers with fluorinated silicon oxides
Sarah E. Kim
,
Christoph Steinbrüchel
Journal:
Solid-State Electronics
Year:
1999
Language:
english
File:
PDF, 125 KB
Your tags:
english, 1999
6
Evaluation and localization of oxygen in thin TiN layers obtained by RTLPCVD from TiCl4–NH3–H2
L. Imhoff
,
A. Bouteville
,
H. de Baynast
,
J.C. Remy
Journal:
Solid-State Electronics
Year:
1999
Language:
english
File:
PDF, 120 KB
Your tags:
english, 1999
7
Observation of current polarity effect in stressing as-formed sub-micron Al–Si–Cu/TiW/TiSi2 contacts
Li-Zen Chen
,
Klaus Y-J Hsu
Journal:
Solid-State Electronics
Year:
1999
Language:
english
File:
PDF, 912 KB
Your tags:
english, 1999
8
Cobalt silicide thermal stability: from blanket thin film to submicrometer lines
A. Alberti
,
F. La Via
,
M.G. Grimaldi
,
S. Ravesi
Journal:
Solid-State Electronics
Year:
1999
Language:
english
File:
PDF, 152 KB
Your tags:
english, 1999
9
An investigation into the performance of diffusion barrier materials against copper diffusion using metal-oxide-semiconductor (MOS) capacitor structures
Vee S.C Len
,
R.E Hurley
,
N McCusker
,
D.W McNeill
,
B.M Armstrong
,
H.S Gamble
Journal:
Solid-State Electronics
Year:
1999
Language:
english
File:
PDF, 167 KB
Your tags:
english, 1999
10
Silicide reaction of Co with Si0.999C0.001
S Teichert
,
M Falke
,
H Giesler
,
G Beddies
,
H.-J Hinneberg
,
G Lippert
,
J Griesche
,
H.J Osten
Journal:
Solid-State Electronics
Year:
1999
Language:
english
File:
PDF, 115 KB
Your tags:
english, 1999
11
Characteristics of sputter-deposited TiN, ZrB2 and W2B diffusion barriers for advanced metallizations to GaAs
M Guziewicz
,
A Piotrowska
,
E Kamińska
,
K Gołaszewska
,
A Turos
,
E Mizera
,
A Winiarski
,
J Szade
Journal:
Solid-State Electronics
Year:
1999
Language:
english
File:
PDF, 171 KB
Your tags:
english, 1999
12
TEM studies of the microstructure evolution in plasma treated CVD TiN thin films used as diffusion barriers
S Ikeda
,
J Palleau
,
J Torres
,
B Chenevier
,
N Bourhila
,
R Madar
Journal:
Solid-State Electronics
Year:
1999
Language:
english
File:
PDF, 165 KB
Your tags:
english, 1999
13
Texturing, surface energetics and morphology in the C49–C54 transformation of TiSi2
Leo Miglio
,
M. Iannuzzi
,
M.G. Grimaldi
,
F. La Via
,
F. Marabelli
,
S. Bocelli
,
S. Santucci
,
A.R. Phani
Journal:
Solid-State Electronics
Year:
1999
Language:
english
File:
PDF, 149 KB
Your tags:
english, 1999
14
Sputtered tungsten films on polyimide, an application for X-ray masks
J Ligot
,
S Benayoun
,
J.J Hantzpergue
,
J.C Remy
Journal:
Solid-State Electronics
Year:
1999
Language:
english
File:
PDF, 124 KB
Your tags:
english, 1999
15
Polymer issues in nanoimprinting technique
Frank Gottschalch
,
Thomas Hoffmann
,
Clivia M Sotomayor Torres
,
Hubert Schulz
,
Hella-Christin Scheer
Journal:
Solid-State Electronics
Year:
1999
Language:
english
File:
PDF, 143 KB
Your tags:
english, 1999
16
Nanometer scale lithography on silicon, titanium and PMMA resist using scanning probe microscopy
Emmanuel Dubois
,
Jean-Luc Bubbendorff
Journal:
Solid-State Electronics
Year:
1999
Language:
english
File:
PDF, 166 KB
Your tags:
english, 1999
17
Nanometer patterning of epitaxial CoSi2/Si(100) by local oxidation
Q.T Zhao
,
M Dolle
,
L Kappius
,
F Klinkhammer
,
St Mesters
,
S Mantl
Journal:
Solid-State Electronics
Year:
1999
Language:
english
File:
PDF, 108 KB
Your tags:
english, 1999
18
Processing and characterisation of sol–gel deposited Ta2O5 and TiO2–Ta2O5 dielectric thin films
A Cappellani
,
J.L Keddie
,
N.P Barradas
,
S.M Jackson
Journal:
Solid-State Electronics
Year:
1999
Language:
english
File:
PDF, 111 KB
Your tags:
english, 1999
19
CoSi2 buffer films on single crystal silicon with Co ions pre-implanted surface layer for YBCO/CoSi2/Si heterostructures
I. Belousov
,
Peter Kus
,
S. Linzen
,
P. Seidel
Journal:
Solid-State Electronics
Year:
1999
Language:
english
File:
PDF, 178 KB
Your tags:
english, 1999
20
Excimer lamp-induced decomposition of platinum acetylacetonate films for electroless copper plating
Jun-Ying Zhang
,
Ian W Boyd
Journal:
Solid-State Electronics
Year:
1999
Language:
english
File:
PDF, 135 KB
Your tags:
english, 1999
21
Oxidation of rf plasma: hydrogenated crystalline Si
S Alexandrova
,
A Szekeres
,
D Dimova-Malinovska
Journal:
Solid-State Electronics
Year:
1999
Language:
english
File:
PDF, 129 KB
Your tags:
english, 1999
22
Thermal behavior of residual strain in silicon-on-insulator bonded wafer and effects on electron mobility
Tsutomu Iida
,
Takamasa Itoh
,
Yukio Takano
,
Adarsh Sandhu
,
Kazuyuki Shikama
Journal:
Solid-State Electronics
Year:
1999
Language:
english
File:
PDF, 131 KB
Your tags:
english, 1999
23
Porous silicon—mechanisms of growth and applications
V. Parkhutik
Journal:
Solid-State Electronics
Year:
1999
Language:
english
File:
PDF, 443 KB
Your tags:
english, 1999
24
Two-dimensional nanowire array formation on Si substrate using self-organized nanoholes of anodically oxidized aluminum
S Shingubara
,
O Okino
,
Y Sayama
,
H Sakaue
,
T Takahagi
Journal:
Solid-State Electronics
Year:
1999
Language:
english
File:
PDF, 112 KB
Your tags:
english, 1999
25
Coulomb blockade: Poisson versus Pauli in a silicon quantum box
L Palun
,
G Lamouche
,
G Fishman
Journal:
Solid-State Electronics
Year:
1999
Language:
english
File:
PDF, 172 KB
Your tags:
english, 1999
26
Determination of the spectral behaviour of porous silicon based photodiodes
R.J Martı́n-Palma
,
R Guerrero-Lemus
,
J.D Moreno
,
J.M Martı́nez-Duart
Journal:
Solid-State Electronics
Year:
1999
Language:
english
File:
PDF, 214 KB
Your tags:
english, 1999
27
The formation of narrow nanocluster bands in Ge-implanted SiO2-layers
J von Borany
,
R Grötzschel
,
K.-H Heinig
,
A Markwitz
,
B Schmidt
,
W Skorupa
,
H.-J Thees
Journal:
Solid-State Electronics
Year:
1999
Language:
english
File:
PDF, 166 KB
Your tags:
english, 1999
28
Influence of carbon-containing contamination in the luminescence of porous silicon
R Guerrero-Lemus
,
F.A Ben Hander
,
J.D Moreno
,
R.J Martı́n-Palma
,
J.M Martı́nez-Duart
,
P Gómez-Garrido
Journal:
Solid-State Electronics
Year:
1999
Language:
english
File:
PDF, 127 KB
Your tags:
english, 1999
29
CdS doped-MOR type zeolite characterization
H Villavicencio Garcı́a
,
M Hernández Vélez
,
O Sánchez Garrido
,
J.M Martı́nez Duart
,
J Jiménez
Journal:
Solid-State Electronics
Year:
1999
Language:
english
File:
PDF, 126 KB
Your tags:
english, 1999
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