Excimer lamp-induced decomposition of platinum...

Excimer lamp-induced decomposition of platinum acetylacetonate films for electroless copper plating

Jun-Ying Zhang, Ian W Boyd
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Volume:
43
Year:
1999
Language:
english
Pages:
5
DOI:
10.1016/s0038-1101(99)00033-7
File:
PDF, 135 KB
english, 1999
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