Optimized dual temperature pulsed laser deposition of TiO...

Semiconductor Science and Technology 2005 / 01 Vol. 20; Iss. 1

Optimized dual temperature pulsed laser deposition of TiO 2 to realize MTOS (metal-TiO 2 –SiO 2 –Si) capacitors with ultrathin gate dielectric

Singh, Ravneet, Paily, Roy, DasGupta, Amitava, DasGupta, Nandita, Misra, Pankaj, Kukreja, Lalit M
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Volume:
20
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/20/1/006
Date:
January, 2005
File:
PDF, 208 KB
english, 2005
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